A relative humidity (RH) sensor device based on n-type porous silicon has been designed, fabricated and characterized. The simple device is a diode reverse dc biased, exhibiting an extremely high sensitivity in ambient air and a large operating range (30–70% RH). Aging and NO2 interference on the sensor performance have been also investigated.
11 Nov 2005
Volume: 111 Pages: 135-139
Sensors and Actuators B: Chemical