A literature survey is made of the various uses of both macroporous and mesoporous silicon in individual microdevices and complex microsystems. The material has been used as a silicon wafer processing tool where it is sacrificial: in a passive role where it provides, for example, thermal or electrical isolation and in an active role where it performs a range of functions. Examples include delivering drugs, sensing, emitting light, storing hydrogen, providing filtration, or having a catalytic role.
Springer International Publishing
1 Jan 2014
Handbook of Porous Silicon