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Type: 
Journal
Description: 
An optical model for Raman response of thin metal films has been developed, taking into account attenuation effects and multi-reflections occurring at film edges. Film thickness and surface morphology of nanometer thin NbN films have been inferred in the framework of this model using micro-Raman measurements. Results have been compared with those obtained by means of spectroscopic ellipsometry. The absolute value of the thickness is determined with a precision better than 20% on nanometric scale allowing us to control surface morphology with high accuracy also on large areas.
Publisher: 
Elsevier
Publication date: 
1 Jun 2013
Authors: 

C Camerlingo, MP Lisitskiy, L De Stefano, I Rea, I Delfino, Maria Lepore

Biblio References: 
Volume: 536 Pages: 142-146
Origin: 
Thin Solid Films