The vacuum arc is a well-known technique for producing coatings with enhanced adhesion and film density. Many cathodic arc deposition systems are actually in use in industry and research. They all work under (high) vacuum conditions in which water vapour pressure is an important source of film contamination, especially in the pulsed arc mode of operation. Here we present a cathodic arc system working under ultra-high vacuum conditions (UHVCA). UHVCA has been used to produce ultra-pure niobium films with excellent structural and electrical properties at a deposition temperature lower than 100 C. The UHVCA technique therefore opens up new perspectives for all applications requiring pure films and low deposition temperatures.
1 Jul 2005
Volume: 18 Issue: 7 Pages: L41
Superconductor Science and Technology